Semiconductor Cleaning Process

Project Synopsis

4차 산업혁명과 Digital Transformation이 가속화됨에 따라 산업 현장에서 발생하는 방대하고 다양한 데이터의 관리를 위해 다양한 측정 장비가 도입되는 추세입니다. 이번 프로젝트에서는 데이터를 효과적으로 관리하기 위해 IoT 및 smartfactory 환경을 가정하여 반도체 8대 공정 중 Wet Cleaning 공정 솔루션을 개발했습니다. 구체적으로 Process1을 Clean1-Clean2-Rinse1으로, Process2를 Clean3-Rinse2로 가정하고 데이터는 각 공정을 완료하는 데 걸리는 시간으로 가정했습니다.

Background Knowledge

반도체 8대 공정 중 Si wafer cutting 후 표면을 매끄럽게 polishing 하는 과정에서 다양한 유·무기 불순물이 잔존하게 됩니다. 이 불순물들을 씼어내 주는 과정이 Cleaning 과정입니다. 주로 Cleaning은 한 번만에 끝내지 않고 여러 차례에 나뉘어 다양한 화학 약품을 사용하여 유·무기물, 금속 불순물을 제거합니다. 이번 프로젝트에서는 Wet Cleaning 과정 중 RCA Cleaning에 대한 솔루션을 개발하였는데 RCA Cleaning 과정에서 제거되는 불순물은 다음과 같습니다.

약품	불순물
HF	Native Oxide
NH4OH/H2O2	Organics, Metals
HCI/H2O2	Akali Ions, Metals

각각의 약품을 통해 불순물을 제거한 후 다음 과정을 위해 말려주는 Rinse 과정을 거치게 됩니다.

Purpose

불순물 제거 및 건조 과정에서 중요한 parameter로써 여길 수 있는 것은 각 과정 진행 시간 및 온도, 습도 등이 있습니다. 이번 프로젝트에서는 이 중 시간에 집중하여 적정 공정 시간을 13분 이상 20분 미만으로 가정했습니다. 기준에 미달한 wafer는 불량품, 기준에 통과한 wafer는 정상, 아직 공정이 시작하지 않은 wafer는 실행전으로 표시되는 Totalprocess라는 table 및 각 wafer 별 현재 진행 상태 및 불량 발생 여부를 판단할 수 있는 UI table을 통해 Node-RED Dashboard로 표현하는 것을 목표로 했습니다.

Programming Tools

Java
OracleDB
Node-RED

Oracle DB

• Process1

WaferId	Clean1	Clean2	Rinse1	Time
1
2
3
...

• Process2

WaferId	Clean3	Rinse2	Time
1
2
3
...

• Totalprocess

WaferId	Clean1	Clean2	Rinse1	Clean3	Rinse2	Time
1
2
3
...

• UI

WaferId	Result	ErrPoint	Time
1
2
3
...

Java Tree

• MVC Pattern
  

Controller

ProcessController.java

Exception

NotExistException.java

Model

Process1DAO.java
Process2DAO.java
TotalprocessDAO.java
UiDAO.java

Model.util

DBUtil.java

Model.dto

Process1DTO.java
Process2DTO.java
TotalprocessDTO.java
UiDTO.java

Service

ProcessService.java

View

RunningEndView.java
RunningStartView.java

Node-RED

• flow
  

[{"id":"a251cec2.9317d","type":"tab","label":"플로우 1","disabled":false,"info":""},{"id":"7aa22138.0ce08","type":"ui_button","z":"a251cec2.9317d","name":"","group":"8ae29b1e.cb8af8","order":6,"width":4,"height":1,"passthru":false,"label":"totalproccess","tooltip":"","color":"","bgcolor":"","icon":"","payload":"1","payloadType":"str","topic":"button","x":170,"y":240,"wires":[["9f358e82.1fc78"]]},{"id":"b26f278.89769d8","type":"oracledb","z":"a251cec2.9317d","name":"","usequery":false,"query":"","usemappings":false,"mappings":"","server":"ebc8a121.d3cd6","resultaction":"single","resultlimit":100,"x":500,"y":220,"wires":[["7f30af84.60289"]]},{"id":"7f30af84.60289","type":"function","z":"a251cec2.9317d","name":"rows to columns","func":"var column = [];\nfor(var key in msg.payload[0]){\n\tcolumn.push(key);\n}\nvar val = [];\nfor(var i = 0; i<msg.payload.length;i++){\n\tval.push(Object.values(msg.payload[i]));\n}\n\nmsg.payload = [column, val];\nreturn msg;","outputs":1,"noerr":0,"initialize":"","finalize":"","x":660,"y":220,"wires":[["c4be1d21.1b1fd","44787c00.a8b0d4","e4dcf8c8.50dfc8","757bd1ac.488a1","bcc44a34.65ea18","953dd407.48f4a8","651bfa46.d15ce4"]]},{"id":"c4be1d21.1b1fd","type":"function","z":"a251cec2.9317d","name":"col1","func":"var col = msg.payload[0][0];\nvar val = msg.payload[1];\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    result+=val[i][0]+'</br><br>';\n}\nmsg.payload = result;\nreturn msg;","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":100,"wires":[["b8042c53.8e97c"]]},{"id":"44787c00.a8b0d4","type":"function","z":"a251cec2.9317d","name":"col2","func":"var col = msg.payload[0][1];\nvar val = msg.payload[1];\nvar len = msg.payload[0].length;\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    result+=val[i][1]+'</br><br>';\n}\nmsg.payload = result;\nif(len>=2){\n\treturn msg;\n} else{\n    return {payload : \"\"}\n}","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":140,"wires":[["1ed84ba8.30c944"]]},{"id":"e4dcf8c8.50dfc8","type":"function","z":"a251cec2.9317d","name":"col3","func":"var col = msg.payload[0][2];\nvar val = msg.payload[1];\nvar len = msg.payload[0].length;\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    result+=val[i][2]+'</br><br>';\n}\nmsg.payload = result;\nif(len>=3){\n\treturn msg;\n} else{\n    return {payload : \"\"}\n}","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":180,"wires":[["7efac7b0.ceeb88"]]},{"id":"757bd1ac.488a1","type":"function","z":"a251cec2.9317d","name":"col4","func":"var col = msg.payload[0][3];\nvar val = msg.payload[1];\nvar len = msg.payload[0].length;\nfunction dts(format){\n    var year = format.getFullYear();\n    var month = format.getMonth() + 1;\n    if(month<10) month = '0' + month;\n    var date = format.getDate();\n    if(date<10) date = '0' + date;\n    var hour = format.getHours();\n    if(hour<10) hour = '0' + hour;\n    var min = format.getMinutes();\n    if(min<10) min = '0' + min;\n    var sec = format.getSeconds();\n    if(sec<10) sec = '0' + sec;\n    return year + \"-\" + month + \"-\" + date + \" \" + hour + \":\" + min + \":\" + sec;\n}\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    if(col=='TIME'){\n        result+=dts(val[i][3])+'</br><br>';\n    } else{\n        result+=val[i][3]+'</br><br>';\n    }\n    \n}\nmsg.payload = result;\nif(len>=4){\n\treturn msg;\n} else{\n    return {payload : \"\"}\n}","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":220,"wires":[["da41c174.ecb91"]]},{"id":"b8042c53.8e97c","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":10,"width":4,"height":11,"name":"1","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":100,"wires":[]},{"id":"1ed84ba8.30c944","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":11,"width":4,"height":11,"name":"2","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":140,"wires":[]},{"id":"7efac7b0.ceeb88","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":12,"width":4,"height":11,"name":"3","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":180,"wires":[]},{"id":"da41c174.ecb91","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":13,"width":4,"height":11,"name":"4","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":220,"wires":[]},{"id":"bcc44a34.65ea18","type":"function","z":"a251cec2.9317d","name":"col5","func":"var col = msg.payload[0][4];\nvar val = msg.payload[1];\nvar len = msg.payload[0].length;\nfunction dts(format){\n    var year = format.getFullYear();\n    var month = format.getMonth() + 1;\n    if(month<10) month = '0' + month;\n    var date = format.getDate();\n    if(date<10) date = '0' + date;\n    var hour = format.getHours();\n    if(hour<10) hour = '0' + hour;\n    var min = format.getMinutes();\n    if(min<10) min = '0' + min;\n    var sec = format.getSeconds();\n    if(sec<10) sec = '0' + sec;\n    return year + \"-\" + month + \"-\" + date + \" \" + hour + \":\" + min + \":\" + sec;\n}\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    if(col=='TIME'){\n        result+=dts(val[i][4])+'</br><br>';\n    } else{\n        result+=val[i][4]+'</br><br>';\n    }\n    \n}\nmsg.payload = result;\nif(len>=5){\n\treturn msg;\n} else{\n    return {payload : \"\"}\n}","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":260,"wires":[["2a96cc57.977894"]]},{"id":"2a96cc57.977894","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":14,"width":4,"height":11,"name":"5","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":260,"wires":[]},{"id":"953dd407.48f4a8","type":"function","z":"a251cec2.9317d","name":"col6","func":"var col = msg.payload[0][5];\nvar val = msg.payload[1];\nvar len = msg.payload[0].length;\nfunction dts(format){\n    var year = format.getFullYear();\n    var month = format.getMonth() + 1;\n    if(month<10) month = '0' + month;\n    var date = format.getDate();\n    if(date<10) date = '0' + date;\n    var hour = format.getHours();\n    if(hour<10) hour = '0' + hour;\n    var min = format.getMinutes();\n    if(min<10) min = '0' + min;\n    var sec = format.getSeconds();\n    if(sec<10) sec = '0' + sec;\n    return year + \"-\" + month + \"-\" + date + \" \" + hour + \":\" + min + \":\" + sec;\n}\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    if(col=='TIME'){\n        result+=dts(val[i][5])+'</br><br>';\n    } else{\n        result+=val[i][5]+'</br><br>';\n    }\n    \n}\nmsg.payload = result;\nif(len>=6){\n\treturn msg;\n} else{\n    return {payload : \"\"}\n}","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":300,"wires":[["4ad74beb.ad4144"]]},{"id":"4ad74beb.ad4144","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":15,"width":4,"height":11,"name":"6","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":300,"wires":[]},{"id":"9f358e82.1fc78","type":"function","z":"a251cec2.9317d","name":"query build","func":"\nvar query = 'select '+ '*' + ' from ' + 'totalprocess' +' order by waferId';\n\n\nvar newMsg = {\n    \"query\": query,\n    \"payload\":[]\n}\nreturn newMsg;","outputs":1,"noerr":0,"initialize":"","finalize":"","x":330,"y":240,"wires":[["b26f278.89769d8"]]},{"id":"745eb9a8.3f6fa8","type":"ui_button","z":"a251cec2.9317d","name":"","group":"8ae29b1e.cb8af8","order":8,"width":4,"height":1,"passthru":false,"label":"ui","tooltip":"","color":"","bgcolor":"","icon":"","payload":"1","payloadType":"str","topic":"button","x":150,"y":280,"wires":[["928fe8a2.c5da28"]]},{"id":"928fe8a2.c5da28","type":"function","z":"a251cec2.9317d","name":"query build","func":"\nvar query = 'select '+ '*' + ' from ' + 'ui'+' order by waferId';\n\n\nvar newMsg = {\n    \"query\": query,\n    \"payload\":[]\n}\nreturn newMsg;","outputs":1,"noerr":0,"initialize":"","finalize":"","x":330,"y":280,"wires":[["b26f278.89769d8"]]},{"id":"2ee7056a.89920a","type":"ui_button","z":"a251cec2.9317d","name":"","group":"8ae29b1e.cb8af8","order":2,"width":4,"height":1,"passthru":false,"label":"proccess1","tooltip":"","color":"","bgcolor":"","icon":"","payload":"1","payloadType":"str","topic":"button","x":170,"y":160,"wires":[["291c7bf2.9b3354"]]},{"id":"291c7bf2.9b3354","type":"function","z":"a251cec2.9317d","name":"query build","func":"var query = 'select '+ '*' + ' from ' + 'process1' +' order by waferId';\nvar newMsg = {\n    \"query\": query,\n    \"payload\":[]\n}\nreturn newMsg;","outputs":1,"noerr":0,"initialize":"","finalize":"","x":330,"y":160,"wires":[["b26f278.89769d8"]]},{"id":"ba4c1416.ae63a8","type":"ui_button","z":"a251cec2.9317d","name":"","group":"8ae29b1e.cb8af8","order":4,"width":4,"height":1,"passthru":false,"label":"process2","tooltip":"","color":"","bgcolor":"","icon":"","payload":"1","payloadType":"str","topic":"button","x":160,"y":200,"wires":[["250f807d.da7a7"]]},{"id":"250f807d.da7a7","type":"function","z":"a251cec2.9317d","name":"query build","func":"\nvar query = 'select '+ '*' + ' from ' + 'process2'+' order by waferId';\n\n\nvar newMsg = {\n    \"query\": query,\n    \"payload\":[]\n}\nreturn newMsg;","outputs":1,"noerr":0,"initialize":"","finalize":"","x":330,"y":200,"wires":[["b26f278.89769d8"]]},{"id":"651bfa46.d15ce4","type":"function","z":"a251cec2.9317d","name":"col7","func":"var col = msg.payload[0][6];\nvar val = msg.payload[1];\nvar len = msg.payload[0].length;\nfunction dts(format){\n    var year = format.getFullYear();\n    var month = format.getMonth() + 1;\n    if(month<10) month = '0' + month;\n    var date = format.getDate();\n    if(date<10) date = '0' + date;\n    var hour = format.getHours();\n    if(hour<10) hour = '0' + hour;\n    var min = format.getMinutes();\n    if(min<10) min = '0' + min;\n    var sec = format.getSeconds();\n    if(sec<10) sec = '0' + sec;\n    return year + \"-\" + month + \"-\" + date + \" \" + hour + \":\" + min + \":\" + sec;\n}\nvar result = col+'<br></br><br>'\nfor(var i =0; i<val.length;i++){\n    if(col=='TIME'){\n        result+=dts(val[i][6])+'</br><br>';\n    } else{\n        result+=val[i][6]+'</br><br>';\n    }\n    \n}\nmsg.payload = result;\nif(len>=7){\n\treturn msg;\n} else{\n    return {payload : \"\"}\n}","outputs":1,"noerr":0,"initialize":"","finalize":"","x":830,"y":340,"wires":[["c06a28e4.6e1938"]]},{"id":"c06a28e4.6e1938","type":"ui_text","z":"a251cec2.9317d","group":"8ae29b1e.cb8af8","order":16,"width":4,"height":11,"name":"7","label":"","format":"{{msg.payload}}","layout":"col-center","x":950,"y":340,"wires":[]},{"id":"8ae29b1e.cb8af8","type":"ui_group","name":"select","tab":"60c448b6.923c28","order":1,"disp":true,"width":28,"collapse":false},{"id":"ebc8a121.d3cd6","type":"oracle-server","host":"localhost","port":"1521","reconnect":true,"reconnecttimeout":"5000","db":"xe"},{"id":"60c448b6.923c28","type":"ui_tab","name":"Home","icon":"dashboard","disabled":false,"hidden":false}]

• query build : 해당 table에 해당하는 select sql query문을 작성합니다.
  
• rows to columns : oracledb node로부터 return된 payload는 데이터 set의 row로 이루어진 array이므로 이를 column으로 이루어진 array로 변환합니다.
  
• col* : 해당 column이 존재한다면 그 array의 값들을 column의 format으로 변환합니다.

Example

• process1
• process2
• totalprocess
• ui

Co-Workers

    
alsrjs2441 seongho726