EUV Lithography Multiblocks and Machines

[littlecube8152]

What

This PR adds all EUV lithography related single block machines and multiblocks.

Outcome

• Polishing machine polishing_machine is renamed to wafer spinner wafer_spinner to accommodate wider recipes
• New single block machine: sputtering machine sputter_deposition, designed to support various PVD methods (with not-comsuables as required apparatuses)
• New multiblock machine: EUV lithographer euv_lithographer, along with many multiblocks components added

Potential Compatibility Issues

• The lang files of polishing machine polishing_machine will be broken.
• GroovyScript recipes tweaks for polishing_machine need to be changed to wafer_spinner.

Additional Notes

Do we actually register the EUV multiblock? It is never going to be used so should I remove that to prevent missing registry when it is gone?

[bruberu]

I should note that there is now a second recipe for the polishing machine in polishing metallurgical rolls, so I would reconsider the renaming of the polishing machine. Also, is this compliant with the new requirements for EV circuits?