Fixed issue #2014 (strm2oas lef/def/gds collect drops cells reference… #2017
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…d by sky130 spare) Problem was that there was the implicit assumption that substitution cells would be top cells (or at least: not child cells of other substitution cells).
1. Output of shape countsi in deep mode was hierarchical with output file, flat without 2. Refactoring of XOR (for_merged optimization) needed to create cover cell variants
…riginal performance
…f a foreign cell cannot be substituted
…t argument even if it is empty
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…d by sky130 spare)
Problem was that there was the implicit assumption that substitution cells would be top cells (or at least: not child cells of other substitution cells).